Special machines in the semiconductor and solar industry
Typical applications: Wafer handling and inspection systems, lithography and exposure systems, precision positioning units, inline measuring and classifying stations
Granite for maximum processing and positioning accuracy in the nanometer range
The miniaturization of the semiconductor and solar industry is progressing steadily. Individual machine layouts and customer-specific precision mechanics are crucial for achieving high process and positioning accuracies, especially for manufacturing processes in the nanometer range.
Granite is the perfect material for this. These granite components manufactured by PLANOLITH for special machines in the semiconductor and solar industry show a selection of different possibilities.
Find out more about the materialExamples of Semiconductor and solar industry
Why granite for your special machine in the Semiconductor and solar industry?
For machines and especially special machines, granite has clear advantages over other materials such as steel, cast iron, plastic, light metal or combinations thereof.
These top 4 properties make granite hard stone the perfect material for your requirements in the semiconductor and solar industry:
- Extreme vibration damping:
Essential for nanometer positioning accuracy - Low vibration during fast movements:
precise positioning despite dynamics - Ultra-high temperature stability:
No expansion in the clean room - Chemical resistance:
Resistant to process chemicals
On request, we can produce drill holes, openings or cable ducts, install linear rails or threaded inserts for air bearings or sensor elements. Everything you need for your tasks.
More about granite in special machine constructionTake advantage of our industry knowledge and consulting expertise
Tell us about your ideas. With our many years of experience in special machine construction for the semiconductor and solar industry, we will work with you to find the best solution, both economically and technically.
